| title | ISBN-13 (ISBN-10) | year of publica- tion | other author(s) |
|---|---|---|---|
| Characterization and Metrology for ULSI Technology 2005 | 978-0-7354-0277-5 (0-7354-0277-9) | 2005 | David G. Seiler · Alain C. Diebold · Robert McDonald · Caroline R. Ayre · Rajinder P. Khosla · Stefan Zollner |
| Frontiers of Characterization and Metrology for Nanoelectronics: 2009 | 978-0-7354-0712-1 (0-7354-0712-6) | 2009 | David G. Seiler · Alain C. Diebold · Robert McDonald · C. Michael Garner · Dan Herr · Rajinder P. Khosla |
| Frontiers of Characterization and Metrology for Nanoelectronics: 2011 | 978-0-7354-0973-6 (0-7354-0973-0) | 2012 | David G. Seiler · Alain C. Diebold · Robert McDonald · Amal Chabli |