Characterization and Metrology for ULSI Technology 2005 (AIP Conference Proceedings / Materials Physics and Applications)

by: David G. Seiler · Alain C. Diebold · Robert McDonald · Caroline R. Ayre · Rajinder P. Khosla · Stefan Zollner · Erik M. Secula Hardcover details (United States). ISBN: 978-0-7354-0277-5 ISBN-10: 0-7354-0277-9 American Inst. of Physics · 2005