Ungyu Paik

U.P.

CRC Press · Routledge

titlemedia typeISBN-13
(ISBN-10)
year of publica-
tion
other author(s)
Nanoparticle Engineering for Chemical-Mechanical Planarization : Fabrication of Next-Generation NanodevicesPaperback978-0-367-44606-2
(0-367-44606-5)
2019Jea-Gun Park
Nanoparticle Engineering for Chemical-Mechanical Planarization : Fabrication of Next-Generation NanodevicesHardcover978-1-4200-5911-3
(1-4200-5911-4)
2009   "

 

Uni-Prof. Dr. Günter Dürig (Einf.)