Nanoparticle Engineering for Chemical-Mechanical Planarization (Open Access): Fabrication of Next-Generation Nanodevices

by: Ungyu Paik · Jea-Gun Park Hardcover details (USA). (see also: eBook (Kindle)) details (UK). (see also: eBook (Kindle)) details (Germany). (see also: Kindle Ausgabe) details (Canada). (see also: eBook (Kindle)) ISBN: 978-1-4200-5911-3 ISBN-10: 1-4200-5911-4 CRC Press · 2009