Nanoparticle Engineering for Chemical-Mechanical Planarization (Open Access): Fabrication of Next-Generation Nanodevices

by: Ungyu Paik · Jea-Gun Park

Paperback

ISBN: 978-0-367-44606-2

ISBN-10: 0-367-44606-5

CRC Press · 29. November 2019

See also:
2009HardcoverNanoparticle Engineering for Chemical-Mechanical Planarization: Fabrication of Next-Generation Nanodevices