Cambridge University Press · Springer
| title | ISBN-13 | year of publica- tion | other author(s) |
|---|---|---|---|
| In Situ Process Diagnostics and Modeling: Volume 569 | 978-1-55899-476-8 | 1999 | E. A. Irene · A. R. Krauss · J. A. Schultz |
| Multicomponent and Multilayered Thin Films for Advanced Microtechnologies: Techniques, Fundamentals and Devices | 978-0-7923-2265-8 | 1993 | Jürgen Engemann |
| Plasma-Surface Interactions and Processing of Materials | 978-0-7923-0584-2 | 1990 | Alberto Gras-Martí · Jose Antonio Valles-Abarca · Daniel L. Flamm |
| Science and Technology of Electroceramic Thin Films | 978-0-7923-3332-6 | 1995 | Rainer Waser |