Plasma-Surface Interactions and Processing of Materials (Nato Science Series E:)
by:
O. Auciello
· Alberto Gras-Martí · Jose Antonio Valles-Abarca ·
Daniel L. Flamm
Hardcover
details (
USA
).
ISBN: 978-0-7923-0584-2
ISBN-10: 0-7923-0584-1
Springer
· 1990