Multicomponent and Multilayered Thin Films for Advanced Microtechnologies: Techniques, Fundamentals and Devices (Nato Science Series E:)
by:
O. Auciello
· Jürgen Engemann
Hardcover
details (
USA
).
ISBN: 978-0-7923-2265-8
ISBN-10: 0-7923-2265-7
Springer
· 1993
