M. K. · M.P. · Mervi Paulasto-Kröckel · P.K.
| title | ISBN-13 (ISBN-10) | year of publica- tion | other author(s) |
|---|---|---|---|
| Handbook of Silicon Based MEMS Materials and Technologies | 978-0-12-817786-0 (0-12-817786-1) | 2020 | Markku Tilli · Matthias Petzold · Horst Theuss · Teruaki Motooka · Veikko Lindroos |
| Interfacial Compatibility in Microelectronics: Moving Away from the Trial and Error Approach | 978-1-4471-6068-7 (1-4471-6068-1) | 2014 | Tomi Laurila · Vesa Vuorinen |