Handbook of Silicon Based MEMS Materials and Technologies (Micro and Nano Technologies)

by: Markku Tilli · Mervi Paulasto-Krockel · Matthias Petzold · Horst Theuss · Teruaki Motooka · Veikko Lindroos

Paperback

details (United States).

ISBN: 978-0-12-817786-0

ISBN-10: 0-12-817786-1

Elsevier · 18. March 2020