| title | ISBN-13 | year of publica- tion | other author(s) |
|---|---|---|---|
| Device And Process Technologies For MEMS, Microelectronics, and Photonics III | 978-0-8194-5169-9 | 2004 | Alex J. Hariz · David N. Jamieson · Giacinta Parish · Vijay K. Varadan |
| Introduction to MEMS | 978-1-59829-653-2 | 2012 | Mu Chiao |
| Micromachining and Microfabrication Process Technology XI | 978-0-8194-6151-3 | 2006 | Mary-ann Maher · Harold D. Stewart |
| Micromachining Technology for Micro-optics and Nano-optics V + Microfabrication Process Technology XII | 978-0-8194-6575-7 | 2007 | Mary-ann Maher · Harold D. Stewart · Thomas J. Suleski · Eric G. Johnson |
| Optical Micro and Nano Technology | 978-0-07-159778-4 | 2009 | |
| Smart Sensors, Actuators, and Mems | 978-0-8194-4976-4 | 2003 | Vijay K. Varadan · Carles Cane |
McGraw-Hill · Morgan and Claypool Publishers · Society of Photo Optical