Device And Process Technologies For MEMS, Microelectronics, and Photonics III (Proceedings of Spie)

by: Jung-Chih Chiao · Alex J. Hariz · David N. Jamieson · Giacinta Parish · Vijay K. Varadan

Paperback

details (USA).

ISBN: 978-0-8194-5169-9

ISBN-10: 0-8194-5169-X

Society of Photo Optical · 2004