Micromachining Technology for Micro-optics and Nano-optics V + Microfabrication Process Technology XII (Proceedings of Spie)

by: Mary-ann Maher · Harold D. Stewart · Jung-Chih Chiao · Thomas J. Suleski · Eric G. Johnson

Paperback

details (United States).

ISBN: 978-0-8194-6575-7

ISBN-10: 0-8194-6575-5

Society of Photo Optical · 2007