| title | ISBN-13 | year of publica- tion | other author(s) |
|---|---|---|---|
| Lithography Process Control | 978-0-8194-3052-6 | 1999 | |
| Optical Microlithography Xxi | 978-0-8194-7109-3 | 2008 | Mircea V. Dusa |
| Principles of Lithography, Second Edition | 978-0-8194-5660-1 | 2005 | |
| Principles of Lithography, Third Edition | 978-0-8194-8324-9 | 2011 | |
H.J. · Harry L. · Harry Levinson · J. L. · J. Levinson