Principles of Lithography, Third Edition (SPIE Press Monograph, Vol. PM198)
by
Harry J. Levinson
Hardcover
details (
USA
).
ISBN: 978-0-8194-8324-9
ISBN-10: 0-8194-8324-9
SPIE Press
· 2011
See also:
2005
Hardcover
Principles of Lithography, Second Edition (SPIE Press Monograph Vol. PM146)