by Harry J. Levinson
Hardcover
ISBN: 978-0-8194-5660-1
ISBN-10: 0-8194-5660-8
SPIE Publications · 2005
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by Harry J. LevinsonHardcover
ISBN: 978-0-8194-5660-1 ISBN-10: 0-8194-5660-8 SPIE Publications · 2005 |
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| 2011 | Hardcover | Principles of Lithography, Third Edition (SPIE Press Monograph, Vol. PM198) |