CRC Press · Woodhead Publishing
title | ISBN-13 (ISBN-10) | year of publication |
---|---|---|
Nanolithography And Patterning Techniques in Microelectronics | 978-0-8493-3447-4 (0-8493-3447-0) | 2005 |
Nanolithography and Patterning Techniques in Microelectronics | 978-1-85573-931-4 (1-85573-931-3) | 2005 |