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by David G. BucknallGebunden
ISBN: 978-0-8493-3447-4 ISBN-10: 0-8493-3447-0 Crc Pr Inc · 2005 |
See also (possibly by other authors): | ||
2005 | Hardcover | Nanolithography and Patterning Techniques in Microelectronics (Woodhead Publishing Series in Electronic and Optical Materials) |