Nanolithography and Patterning Techniques in Microelectronics (Woodhead Publishing in Materials)

Nanolithography

by David G. Bucknall

Gebunden

ISBN: 978-0-8493-3447-4

ISBN-10: 0-8493-3447-0

Crc Pr Inc · 2005

See also (possibly by other authors):
2005HardcoverNanolithography and Patterning Techniques in Microelectronics (Woodhead Publishing Series in Electronic and Optical Materials)