Nanolithography and Patterning Techniques in Microelectronics (Woodhead Publishing Series in Electronic and Optical Materials)

Nanolithography

by D. Bucknall

Hardcover

ISBN: 978-1-85573-931-4

ISBN-10: 1-85573-931-3

Woodhead Publishing Ltd · 2005

See also:
2005HardcoverNanolithography and patterning techniques in microelectronics (Woodhead Publishing in Materials)