|   | by Richard LeachPaperback details (USA). details (UK). details (Germany). details (Canada). ISBN: 978-0-12-810153-7 ISBN-10: 0-12-810153-9 William Andrew · 2018 | 
| See also: | ||
| 2014 | Hardcover | Fundamental Principles of Engineering Nanometrology (Micro and Nano Technologies) | 
| 2009 | Hardcover | Fundamental Principles of Engineering Nanometrology (Micro and Nano Technologies) |