|   | by Richard LeachHardcover details (United Kingdom). details (USA). details (Germany). details (Canada). ISBN: 978-0-08-096454-6 ISBN-10: 0-08-096454-0 William Andrew · 2009 | 
| See also: | ||
| 2018 | Paperback | Fundamental Principles of Engineering Nanometrology (Micro and Nano Technologies) | 
| 2014 | Hardcover | Fundamental Principles of Engineering Nanometrology (Micro and Nano Technologies) |