| title | ISBN-13 (ISBN-10) | year of publica- tion | other author(s) |
|---|---|---|---|
| Chemical-Mechanical Polishing of Low Dielectric Constant Polymers and Organosilicate Glasses: Fundamental Mechanisms and Application to IC Interconnect Technology | 978-1-4613-5424-6 (1-4613-5424-2) | 2014 | Christopher Lyle Borst · Ronald J. Gutmann |
N.G. · W G · William G. · William Gill · William N.