Chemical-Mechanical Polishing of Low Dielectric Constant Polymers and Organosilicate Glasses: Fundamental Mechanisms and Application to IC Interconnect Technology

Interconnect

by: Christopher Lyle Borst · William N. Gill · Ronald J. Gutmann

Paperback

details (United States).

ISBN: 978-1-4613-5424-6

ISBN-10: 1-4613-5424-2

Springer · 2014