| title | ISBN-13 (ISBN-10) | year of publica- tion | other author(s) |
|---|---|---|---|
| Handbook of Plasma Processing Technology: Fundamental, Etching, Deposition and Surface Interactions | 978-0-8155-1220-2 (0-8155-1220-1) | 1990 | Stephen M. Rossnagel · Jerome J. Cuomo |
| Sputter deposition | 978-0-7354-0105-1 (0-7354-0105-5) | 2003 | |
| Tantalum thin films | 978-0-12-744750-6 (0-12-744750-4) | 1975 | |
D.W. · W.D. Westwood · W.W. · William D. · William W.
Academic Press · American Institute of Physics · William Andrew