Handbook of Plasma Processing Technology: Fundamental, Etching, Deposition and Surface Interactions (Materials Science and Process Technology)

by: Stephen M. Rossnagel · William D. Westwood · Jerome J. Cuomo Hardcover details (USA). details (Italy). (see also: Copertina rigida) details (Spain - España). (see also: Tapa dura) ISBN: 978-0-8155-1220-2 ISBN-10: 0-8155-1220-1 William Andrew · 1990