| title | ISBN-13 (ISBN-10) | year of publica- tion | other author(s) |
|---|---|---|---|
| Characterization and Metrology for Ulsi Technology: 1998 International Conference | 978-1-56396-753-5 (1-56396-753-7) | 1998 | D.G. Seiler · A.C. Diebold · T.J. Shaffner · R. McDonald · E.J. Walters |