Characterization and Metrology for Ulsi Technology: 1998 International Conference (AIP Conference Proceedings, Vol. 449 With CD ROM)

by: D.G. Seiler · A.C. Diebold · W.M. Bullis · T.J. Shaffner · R. McDonald · E.J. Walters Hardcover details (United States). ISBN: 978-1-56396-753-5 ISBN-10: 1-56396-753-7 American Inst. of Physics · 1998