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Veikko Lindroos
V. L.
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(ISBN-10)
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tion
other author(s)
Handbook of Silicon Based MEMS Materials and Technologies
978-O-12-817786-O
(O-12-817786-1)
2020
Markku Tilli · Mervi Paulasto-Krockel · Matthias Petzold · Horst Theuss · Teruaki Motooka
Veikko Louhevaara