U. M. Gosele

titleISBN-13
(ISBN-10)
year of publica-
tion
other author(s)
C, H, N and O in Si and Characterization and Simulation of Materials and Processes978-O-444-82413-4
(O-444-82413-8)
1996A. Borghesi · J. Vanhellemont · A. M. Gue · M. Djafari-Rouhani

M G*** · U. G. · U. Gosele

U. M. Hager