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> U. M. Gosele
U. M. Gosele
title
ISBN-13
(ISBN-10)
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tion
other author(s)
C, H, N and O in Si and Characterization and Simulation of Materials and Processes
978-O-444-82413-4
(O-444-82413-8)
1996
A. Borghesi · J. Vanhellemont · A. M. Gue · M. Djafari-Rouhani
M G***
·
U. G.
·
U. Gosele
U. M. Hager