C, H, N and O in Si and Characterization and Simulation of Materials and Processes (European Materials Research Society Symposia Proceedings)

by: A. Borghesi · U. M. Gosele · J. Vanhellemont · A. M. Gue · M. Djafari-Rouhani

Hardcover

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ISBN: 978-0-444-82413-4

ISBN-10: 0-444-82413-8

North-Holland · 1996