T. J. Shaffner

J. S. · T.J. · T.S.

titleISBN-13
(ISBN-10)
year of publica-
tion
other author(s)
Characterization and Metrology for Ulsi Technology: 1998 International Conference978-1-56396-753-5
(1-56396-753-7)
1998D.G. Seiler · A.C. Diebold · W.M. Bullis · R. McDonald · E.J. Walters
Proceedings of the Electrochemical Society Symposium on Diagnostic Techniques for Semiconductor Materials and Devices978-0-8194-2765-6
(0-8194-2765-9)
1997P. Rai-Choudhury · J. L. Benton · Dieter K. Schroder
Semiconductor Measurements and Instrumentation978-0-07-057697-1
(0-07-057697-1)
1998W. R. Runyan

American Institute of Physics · McGraw-Hill · Society of Photo Optical

 

T.J. Shank