title | ISBN-13 (ISBN-10) | year of publica- tion | other author(s) |
---|---|---|---|
Characterization and Metrology for Ulsi Technology: 1998 International Conference | 978-1-56396-753-5 (1-56396-753-7) | 1998 | D.G. Seiler · A.C. Diebold · W.M. Bullis · R. McDonald · E.J. Walters |
Proceedings of the Electrochemical Society Symposium on Diagnostic Techniques for Semiconductor Materials and Devices | 978-0-8194-2765-6 (0-8194-2765-9) | 1997 | P. Rai-Choudhury · J. L. Benton · Dieter K. Schroder |
Semiconductor Measurements and Instrumentation | 978-0-07-057697-1 (0-07-057697-1) | 1998 | W. R. Runyan |
American Institute of Physics · McGraw-Hill · Society of Photo Optical