Switzerland) IEEE International Conference on Micro Electro Mechanical Systems (14th : 2001 Interlaken

titleISBN-13
(ISBN-10)
year of publication
Mems 2001: The 14th IEEE International Conference on Micro Electro Mechanical Systems: Interlaken, Switzerland January 21-25, 2001978-O-78O3-5998-7
(O-78O3-5998-4)
2001

I.C. · S.C. · S. I. International

Switzerland) IEEE International Symposium on Applications of Ferroelectrics (11th : 1998 : Montreux