Mems 2001: The 14th IEEE International Conference on Micro Electro Mechanical Systems: Interlaken, Switzerland January 21-25, 2001

Switzerland

by Switzerland) IEEE International Conference on Micro Electro Mechanical Systems (14th : 2001 Interlaken

Paperback

ISBN: 978-0-7803-5998-7

ISBN-10: 0-7803-5998-4

IEEE · 2001