Mems 2001: The 14th IEEE International Conference on Micro Electro Mechanical Systems: Interlaken, Switzerland January 21-25, 2001
by
Switzerland) IEEE International Conference on Micro Electro Mechanical Systems (14th : 2001 Interlaken
Paperback
details (
USA
).
ISBN: 978-0-7803-5998-7
ISBN-10: 0-7803-5998-4
IEEE
· 2001