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Society of Photo Optical
> Steven P. Levitan
Steven P. Levitan
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ISBN-13
(ISBN-10)
year of publica-
tion
other author(s)
Design, Test, Integration, and Packaging of Mems/ Moems 2001
978-O-8194-41O9-6
(O-8194-41O9-O)
2001
Bernard Courtois · Jean-Michel Karam · Karen W. Markus · Andrew A. Tay
S. L.
·
S. P.
·
Steven L.
Steven P. Lewis