Design, Test, Integration, and Packaging of Mems/ Moems 2001 (Proceedings of Spie)

by: Bernard Courtois · Jean-Michel Karam · Steven P. Levitan · Karen W. Markus · Andrew A. Tay

Paperback

ISBN: 978-0-8194-4109-6

ISBN-10: 0-8194-4109-0

Society of Photo Optical · 2001