Stefan Zellmeier · Stephan Zöllner
| title | ISBN-13 (ISBN-10) | year of publica- tion | other author(s) |
|---|---|---|---|
| Characterization and Metrology for ULSI Technology 2005 | 978-O-7354-O277-5 (O-7354-O277-9) | 2005 | David G. Seiler · Alain C. Diebold · Robert McDonald · Caroline R. Ayre · Rajinder P. Khosla · Erik M. Secula |