| title | ISBN-13 | year of publica- tion | other author(s) |
|---|---|---|---|
| Emerging Lithographic Technologies II: 23-25 February 1998 Santa Clara, California | 978-0-8194-2776-2 | 1998 | Society of Photo-Optical Instrumentation Engineers · Sematech (Organization) |
| Emerging Lithographic Technologies III: 15-17 March, 1999, Santa Clara, California | 978-0-8194-3150-9 | 1999 | Society of Photo-Optical Instrumentation Engineers |
| Metrology, Inspection, and Process Control for Microlithography Xiii: 15-18 March, 1999, Santa Clara, California | 978-0-8194-3151-6 | 1999 | " |
| Optical Microlithography XI: 25-27 February, 1998, Santa Clara, California | 978-0-8194-2779-3 | 1998 | Society of Photo-Optical Instrumentation Engineers · Sematech (Organization) |
| Optical Microlithography XII: Proceedings of Spie 17-19 March 1999 Santa Clara, California | 978-0-8194-3153-0 | 1999 | Society of Photo-Optical Instrumentation Engineers |