Optical Microlithography XI: 25-27 February, 1998, Santa Clara, California (Proceedings of Spie--The International Society for Optical Engineering, V. 3334.)

by: Society of Photo-Optical Instrumentation Engineers · Semiconductor Equipment and Materials International · Sematech (Organization)

Paperback

details (USA).

ISBN: 978-0-8194-2779-3

ISBN-10: 0-8194-2779-9

Society of Photo Optical · 1998