| title | ISBN-13 (ISBN-10) | year of publica- tion | other author(s) |
|---|---|---|---|
| Emerging Lithographic Technologies II: 23-25 February 1998 Santa Clara, California | 978-0-8194-2776-2 (0-8194-2776-4) | 1998 | Society of Photo-Optical Instrumentation Engineers · Semiconductor Equipment and Materials International |
| Optical Microlithography XI: 25-27 February, 1998, Santa Clara, California | 978-0-8194-2779-3 (0-8194-2779-9) | 1998 | Society of Photo-Optical Instrumentation Engineers · Semiconductor Equipment and Materials International |