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| title | ISBN-13 (ISBN-10) | year of publica- tion | other author(s) |
|---|---|---|---|
| Chemical Mechanical Planarization of Microelectronic Materials | 978-0-471-13827-3 (0-471-13827-4) | 1997 | Joseph M. Steigerwald · Shyam P. Murarka |
| Chemical-Mechanical Polishing of Low Dielectric Constant Polymers and Organosilicate Glasses: Fundamental Mechanisms and Application to IC Interconnect Technology | 978-1-4613-5424-6 (1-4613-5424-2) | 2014 | Christopher Lyle Borst · William N. Gill |
| Wafer Level 3-D ICs Process Technology | 978-0-387-76532-7 (0-387-76532-8) | 2008 | Chuan Seng Tan · L. Rafael Reif |