| title | ISBN-13 (ISBN-10) | year of publica- tion | other author(s) |
|---|---|---|---|
| Silicon Front-End Technology _ Materials Processing and Modelling: Volume 532 | 978-1-1O7-41372-6 (1-1O7-41372-9) | 2014 | Nicholas E. B. Cowern · Dale C. Jacobson · Peter B. Griffin · Paul A. Packan |