Silicon Front-End Technology _ Materials Processing and Modelling: Volume 532 (MRS Proceedings)

by: Nicholas E. B. Cowern · Dale C. Jacobson · Peter B. Griffin · Paul A. Packan · Roger P. Webb

Paperback

details (UK).

ISBN: 978-1-107-41372-6

ISBN-10: 1-107-41372-9

Cambridge University Press · 2014