Norman F. Sheppard Jr

titleISBN-13
(ISBN-10)
year of publica-
tion
other author(s)
Microelectromechanical Systems-Materials and Devices III: Volume 1222978-1-1O7-4O8O4-3
(1-1O7-4O8O4-O)
2014Jörg Bagdahn · Keviin T. Turner · Srikar Vengallatore

F. J. · F.S · n/s · Norman F. · S.J. · SHEPPARD J

Norman F. Smith