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Cambridge University Press
> Norman F. Sheppard Jr
Norman F. Sheppard Jr
title
ISBN-13
(ISBN-10)
year of publica-
tion
other author(s)
Microelectromechanical Systems-Materials and Devices III: Volume 1222
978-1-1O7-4O8O4-3
(1-1O7-4O8O4-O)
2014
Jörg Bagdahn · Keviin T. Turner · Srikar Vengallatore
F. J.
·
F.S
·
n/s
·
Norman F.
·
S.J.
·
SHEPPARD J
Norman F. Smith