Microelectromechanical Systems-Materials and Devices III: Volume 1222 (MRS Proceedings)

by: Jörg Bagdahn · Norman F. Sheppard Jr · Keviin T. Turner · Srikar Vengallatore

Paperback

details (UK).

ISBN: 978-1-107-40804-3

ISBN-10: 1-107-40804-0

Cambridge University Press · 2014