| title | ISBN-13 (ISBN-10) | year of publica- tion | other author(s) |
|---|---|---|---|
| Micro-Electro-Mechanical Systems (Mems) 1998: Micro-Manuacturing Processes in Mems and Other Advanced Systems | 978-O-7918-1596-O (O-7918-1596-X) | 1998 | Xiang Zhang · Liwei Lin · Fred K. Forster |
n/a · N.R. · Narayan Aluru · R. A.