Micro-Electro-Mechanical Systems (Mems) 1998: Micro-Manuacturing Processes in Mems and Other Advanced Systems (Dsc (Series), Vol. 66.)

by: Ga.) International Mechanical Engineering Congress and Exposition (1996 : Atlanta · American Society of Mechanical Engineers Dynamic Systems and Control Division Paperback details (USA). ISBN: 978-0-7918-1596-0 ISBN-10: 0-7918-1596-X Amer Society of Mechanical · 1998