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> NADIM WILLIAMS, KIRT MALUF
NADIM WILLIAMS, KIRT MALUF
title
ISBN-13
(ISBN-10)
year of publication
INTRODUCTION TO MICROELECTROMECHANICAL SYSTEMS ENGINEERING
978-1-58O53-591-5
(1-58O53-591-7)
2004
K.M.
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N K
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N M
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N. Williams
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Nadim M.
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Nadim Maluf
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W. K.
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W. M.
·
Williams M
Nadine Wachter