INTRODUCTION TO MICROELECTROMECHANICAL SYSTEMS ENGINEERING

by NADIM WILLIAMS, KIRT MALUF

Paperback

ISBN: 978-1-58053-591-5

ISBN-10: 1-58053-591-7

ARTECH HOUSE · 2004

See also (possibly by other authors):
2004HardcoverAn Introduction to Microelectromechanical Systems Engineering, Second Edition
2004PaperbackAn Introduction to Microelectromechanical Systems Engineering, Second Edition
2000HardcoverAn Introduction to Microelectromechanical Systems Engineering