Miko Elwenspoek

M.E · M. Elwenspoek

Cambridge University Press · Springer

title ISBN-13
(ISBN-10)
year of publica-
tion
other author(s)
Mechanical Microsensors
978-3-540-67582-2
(3-540-67582-5)
2000R. Wiegerink
Sensor Technology 2001: Proceedings of the Sensor Technology Conference 2001, held in Enschede, The Netherlands 14-15 May, 2001 978-0-7923-7012-3
(0-7923-7012-0)
2001
Silicon Micromachining 978-0-521-60767-4
(0-521-60767-1)
2004Henri V. Jansen

 

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