Silicon Micromachining (Cambridge Studies in Semiconductor Physics and Microelectronic Engineering)

Micromachining

by M. Elwenspoek

Paperback

ISBN: 978-0-521-60767-4

ISBN-10: 0-521-60767-1

Cambridge University Press · 2008

See also:
1999HardcoverSilicon Micromachining (Cambridge Studies in Semiconductor Physics and Microelectronic Engineering)